AUG 26-31, 2012

IUMRS-ICA, Busan, Korea

[POSTER]

Thickness Optimization of SiN Films in SiN-based Resistive Switching Memory Cells via Reactive RF Sputtering Methods

Hee-Dong Kim, Seok Man Hong, Ho-Myong An, Yujeong Seo, Minyeong song, Dongming Li, and Tae Geun Kim*