Conferences

[IUMRS-ICA] Thickness Optimization of SiN Films in SiN-based Resistive Switching Memory Cells via Reactive RF Sputtering Methods

2012
작성자
김나현
작성일
2012-08-31 16:59
조회
207

AUG 26-31, 2012

IUMRS-ICA, Busan, Korea

[POSTER]

Thickness Optimization of SiN Films in SiN-based Resistive Switching Memory Cells via Reactive RF Sputtering Methods

Hee-Dong Kim, Seok Man Hong, Ho-Myong An, Yujeong Seo, Minyeong song, Dongming Li, and Tae Geun Kim*

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