Papers

Effect of the N2/(Ar+N2) Flow Ratio on the Synthesis of Zirconium Nitride Thin Films by DC Reactive Sputtering (IF 0.535; JCR 93.529%)

2004~2009
작성자
김태형
작성일
2009-06-18 15:13
조회
186

저널명 : Journal of the Korean Physical Society, 55, No. 3, 1149 (2009, SEP)

논문 저자
Dong Ho Kim, Chul Min Kim, Eun Hong Kim, Young Chul Shin and Tae Geun Kim
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